No Access Submitted: 01 November 1983 Accepted: 29 November 1983 Published Online: 04 June 1998
Appl. Phys. Lett. 44, 453 (1984); https://doi.org/10.1063/1.94764
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  • Department of Electrical Engineering, Colorado State University, Ft. Collins, Colorado 80523
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  • S. M. Goodnick
  • T. Hwang
  • C. W. Wilmsen
The drift in channel current of SiO2/InP metal‐insulator‐semiconductor field‐effect transistors has been calculated using a model in which electrons thermionically tunnel to a conducting layer of In2O3 within the native oxide at the interface. Calculations based on this model using reasonable values for the interface parameters are in good agreement with experimental data. The model differs from previous drift models in that trapping occurs between bulklike materials and not through discrete trap levels and is based on physical evidence for the structure of the SiO2/InP interface.
  1. 1. D. L. Lile, D. A. Collins, L. G. Meiners, and L. Messick, Electron. Lett. 14, 657 (1978). Google ScholarCrossref, ISI
  2. 2. D. Fritsche, Inst. Phys. Conf. Ser. 50, 258 (1980). Google Scholar
  3. 3. M. Okamura and T. Kobayashi, Jpn. J. Appl. Phys. 19, 2143 (1980). Google ScholarCrossref, ISI
  4. 4. D. Lile and M. J. Taylor, J. Appl. Phys. 54, 260 (1983). Google ScholarScitation, ISI
  5. 5. P. van Staa, H. Romlach, and R. Kassing, J. Appl. Phys. 54, 4014 (1983). Google ScholarScitation, ISI
  6. 6. F. P. Heiman and G. Warfield, IEEE Trans. Electron Devices ED‐12, 167 (1965). Google ScholarCrossref, ISI
  7. 7. J. F. Wager and C. W. Wilmsen, J. Appl. Phys. 53, 5789 (1982). Google ScholarScitation, ISI
  8. 8. J. F. Wager, K. M. Geib, and C. W. Wilmsen, and L. L. Kazmerski, J. Vac. Sci. Technol. B 1, 778 (1983). Google ScholarCrossref, ISI
  9. 9. W. A. Harrison, Phys. Rev. 123, 85 (1961). Google ScholarCrossref, ISI
  10. 10. H. C. Card and E. H. Rhoderick, J. Phys. D 4, 1589 (1971). Google ScholarCrossref, ISI
  11. 11. T. Sawada, H. Hasegawa, and H. Ohno, Thin Solid Films 1033 (1980). Google Scholar
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