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Published Online: 17 August 2015
Accepted: August 2015

Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

Appl. Phys. Lett. 107, 073104 (2015); https://doi.org/10.1063/1.4928709
J. Llobet1, M. Sansa1, a), M. Lorenzoni1, X. Borrisé2, A. San Paulo3, and F. Pérez-Murano1, b)
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Abstract
The effect of geometrical asymmetries on the piezoresistive transduction in suspended double clamped beam nanomechanical resonators is investigated. Tapered silicon nano-beams, fabricated using a fast and flexible prototyping method, are employed to determine how the asymmetry affects the transduced piezoresistive signal for different mechanical resonant modes. This effect is attributed to the modulation of the strain in pre-strained double clamped beams, and it is confirmed by means of finite element simulations.

References

  1. 1. L. Nicu, V. Auzelyte, L. G. Villanueva, N. Barniol, F. Perez-Murano, W. J. Venstra, H. S. J. van der Zant, G. Abadal, V. Savu, and J. Brugger, “ Nanoelectromechanical systems,” in Resonant MEMS: Fundamentals, Implementation, and Application, edited by O. Brandt et al. ( Wiley, 2015), pp. 287-304. Google ScholarCrossref
  2. 2. J. Chaste, A. Eichler, J. Moser, G. Ceballos, R. Rurali, and A. Bachtold, Nat. Nanotechnol. 7, 301 (2012). https://doi.org/10.1038/nnano.2012.42, , Google ScholarCrossref, CAS
  3. 3. M. S. Hanay, S. Kelber, A. K. Naik, D. Chi, S. Hentz, E. C. Bullard, E. Colinet, L. Duraffourg, and M. L. Roukes, Nat. Nanotechnol. 7, 602 (2012). https://doi.org/10.1038/nnano.2012.119, , Google ScholarCrossref, CAS
  4. 4. J. L. Muñoz-Gamara, P. Alcaine, E. Marigó, J. Giner, A. Uranga, J. Esteve, and N. Barniol, Microelectron. Eng. 110, 246 (2013). https://doi.org/10.1016/j.mee.2013.01.038, , Google ScholarCrossref
  5. 5. G. Abadal, Z. J. Davis, B. Helbo, X. Borrisé, R. Ruiz, A. Boisen, F. Campabadal, J. Esteve, E. Figueras, F. Pérez-Murano, and N. Barniol, Nanotechnology 12, 100–104 (2001). https://doi.org/10.1088/0957-4484/12/2/305, , Google ScholarCrossref, CAS
  6. 6. L. Guillermo Villanueva, R. B. Karabalin, M. H. Matheny, E. Kenig, M. C. Cross, and M. L. Roukes, Nano Lett. 11, 5054 (2011). https://doi.org/10.1021/nl2031162, , Google ScholarCrossref
  7. 7. M. Li, H. X. Tang, and M. L. Roukes, Nat. Nanotechnol. 2, 114 (2007). https://doi.org/10.1038/nnano.2006.208, , Google ScholarCrossref, CAS
  8. 8. R. He and P. Yang, Nat. Nanotechnol. 1, 42 (2006). https://doi.org/10.1038/nnano.2006.53, , Google ScholarCrossref, CAS
  9. 9. K. Winkler, E. Bertagnolli, and A. Lugstein, Nano Lett. 15, 1780 (2015). https://doi.org/10.1021/nl5044743, , Google ScholarCrossref, CAS
  10. 10. M. Sansa, M. Fernández-Regúlez, J. Llobet, Á. San Paulo, and F. Pérez-Murano, Nat. Commun. 5, 4313 (2014). https://doi.org/10.1038/ncomms5313, , Google ScholarCrossref, CAS
  11. 11. J. Llobet, M. Sansa, M. Gerbolés, N. Mestres, J. Arbiol, X. Borrisé, and F. Pérez-Murano, Nanotechnology 25, 135302 (2014). https://doi.org/10.1088/0957-4484/25/13/135302, , Google ScholarCrossref, CAS
  12. 12. G. Rius, J. Llobet, J. Arcamone, X. Borrisé, and F. Pérez-Murano, Microelectron. Eng. 86, 1046 (2009). https://doi.org/10.1016/j.mee.2009.01.006, , Google ScholarCrossref, CAS
  13. 13. J. Llobet, M. Gerbolés, M. Sansa, J. Bausells, X. Borrisé, and F. Pérez-Murano, J. Micro/Nanolithogr. MEMS MOEMS 14, 031207 (2015). https://doi.org/10.1117/1.JMM.14.3.031207, , Google ScholarCrossref
  14. 14. V. Gouttenoire, T. Barois, S. Perisanu, J.-L. Leclercq, S. T. Purcell, P. Vincent, and A. Ayary, Small 6, 1060 (2010). https://doi.org/10.1002/smll.200901984, , Google ScholarCrossref, CAS
  15. 15. M. Sansa, M. Fernández-Regúlez, Á. San Paulo, and F. Pérez-Murano, Appl. Phys. Lett. 101, 243115 (2012). https://doi.org/10.1063/1.4771982, , Google ScholarScitation
  16. 16. V. Sazonova, Y. Yalsh, H. Üstünel, D. Roundy, T. A. Arlas, and P. L. McEuen, Nature 431, 284 (2004). https://doi.org/10.1038/nature02905, , Google ScholarCrossref, CAS
  17. 17. R. He, X. L. Feng, M. K. Roukes, and P. Yang, Nano Lett. 8, 1756 (2008). https://doi.org/10.1021/nl801071w, , Google ScholarCrossref
  18. 18. See supplementary material at http://dx.doi.org/10.1063/1.4928709E-APPLAB-107-061533 for detailed information about the devices characterized, AFM characterization of the beams, simulation, and modelling. , Google Scholar
  19. 19. M. S. Hanay, S. I. Kelber, C. D. O'Connel, P. Mulvaney, J. E. Sader, and M. L. Roukes, Nat. Nanotechnol. 10, 339–344 (2015). https://doi.org/10.1038/nnano.2015.32, Google ScholarCrossref, CAS
  20. © 2015 AIP Publishing LLC.

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