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No Access Submitted: 18 September 2013 Accepted: 25 November 2013 Published Online: 12 December 2013

  • Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

Appl. Phys. Lett. 103, 241112 (2013); https://doi.org/10.1063/1.4846515
D. T. Nguyen1, C. Baker1, W. Hease1, S. Sejil1, P. Senellart2, A. Lemaître2, S. Ducci1, G. Leo1, and I. Favero1
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  • D. T. Nguyen
  • C. Baker
  • W. Hease
  • S. Sejil
  • P. Senellart
  • A. Lemaître
  • S. Ducci
  • G. Leo
  • I. Favero
ABSTRACT
We report on optomechanical GaAs disk resonators with ultrahigh quality factor-frequency product Q×f. Disks standing on a simple pedestal exhibit GHz mechanical breathing modes attaining a Q×f of 1013 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation. An improved disk resonator geometry integrating a shield within the pedestal is then proposed, and its working principles and performances are investigated by numerical simulations. For dimensions compatible with fabrication constraints, the clamping-loss-limited Q reaches 107–109 corresponding to Q×f equals 1016–1018. This shielded pedestal approach applies to any heterostructure presenting an acoustic mismatch.
This work was supported by the French ANR through the NOMADE project and by the ERC through the GANOMS project. The authors thank E. Gil-Santos for technical insights.

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