Abstract
A quantitative study of the dynamics of threshold-voltage shifts with time in gallium-indium zinc oxide amorphous thin-film transistors is presented using standard analysis based on the stretched exponential relaxation. For devices using thermal silicon oxide as gate dielectric, the relaxation time is at room temperature with activation energy of 0.68 eV. These transistors approach the stability of the amorphous silicon transistors. The threshold voltage shift is faster after water vapor exposure suggesting that the origin of this instability is charge trapping at residual-water-related trap sites.
The authors wish to thank the Portuguese Foundation for Science and Technology for financial support of this work to the research units CEOT CENIMAT/I3N and to projs. PTDC/EEA-ELC/64975/2006 and PTDC/CTM/73943/2006.
REFERENCES
- 1. P. Barquinha, L. Pereira, G. Goncalves, R. Martins, and E. Fortunato, J. Electrochem. Soc. 156, H161 (2009). https://doi.org/10.1149/1.3049819, Google ScholarCrossref
- 2. J. Y. Kwon, K. S. Son, J. S. Jung, T. S. Kim, M. K. Ryu, K. B. Park, B. W. Yoo, J. W. Kim, Y. G. Lee, K. C. Park, S. Y. Lee, and J. M. Kim, IEEE Electron Device Lett. 29, 1309 (2008). https://doi.org/10.1109/LED.2008.2006637, Google ScholarCrossref
- 3. J. Park, S. Kim, C. Kim, S. Kim, I. Song, H. Yin, K. K. Kim, S. Lee, K. Hong, J. Lee, J. Jung, E. Lee, K. W. Kwon, and Y. Park, Appl. Phys. Lett. 93 053505 (2008). https://doi.org/10.1063/1.2962985, Google ScholarScitation
- 4. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature (London) 432, 488 (2004). https://doi.org/10.1038/nature03090, Google ScholarCrossref
- 5. J. M. Lee, I. Y. Cho, J. H. Lee, and H. I. Kwon, Appl. Phys. Lett. 93, 093504 (2008). https://doi.org/10.1063/1.2977865, Google ScholarScitation, ISI
- 6. R. Wehrspohn, S. Deane, I. French, and M. Powell, Thin Solid Films 383, 117 (2001). https://doi.org/10.1016/S0040-6090(00)01581-9, Google ScholarCrossref
- 7. Y. He, R. Hattori, and J. Kanicki, IEEE Electron Device Lett. 21, 233 (2000). https://doi.org/10.1109/55.841306, Google ScholarCrossref
- 8. A. Nathan, G. R. Chaji, and S. J. Ashtiani, J. Disp. Technol. 1, 267 (2005). https://doi.org/10.1109/JDT.2005.858913, Google ScholarCrossref
- 9. H. L. Gomes, P. Stallinga, F. Dinelli, M. Murgia, F. Biscanini, D. M. Leeuw, T. Muck, J. Geurts, L. W. Molenkamp, and V. Wagner, Appl. Phys. Lett. 84, 3184 (2004). https://doi.org/10.1063/1.1713035, Google ScholarScitation, ISI
- 10. S. G. J. Mathijssen, M. Cölle, H. Gomes, E. C. P. Smits, B. de Boer, I. McCulloch, P. A. Bobbert, and D. M. de Leeuw, Adv. Mater. (Weinheim, Ger.) 19, 2785 (2007). https://doi.org/10.1002/adma.200602798, Google ScholarCrossref
- 11. S. G. J. Mathijssen, M. Kemerink, A. Sharma, M. Cölle, P. A. Bobbert, R. A. J. Janssen, and D. M. de Leeuw, Adv. Mater. (Weinheim, Ger.) 20, 975 (2008). https://doi.org/10.1002/adma.200702688, Google ScholarCrossref
- 12. P. Görrn, P. Hölzer, T. Riedl, W. Kowalsky, J. Wang, T. Weimann, P. Hinze, and S. Kipp, Appl. Phys. Lett. 90, 063502 (2007). https://doi.org/10.1063/1.2458457, Google ScholarScitation, ISI
- 13. A. Suresh and J. F. Muth, Appl. Phys. Lett. 92, 033502 (2008). https://doi.org/10.1063/1.2824758, Google ScholarScitation, ISI
- 14. I. T. Cho, J. M. Lee, J. H. Lee, and H. I. Kwon, Semicond. Sci. Technol. 24, 015013 (2009). https://doi.org/10.1088/0268-1242/24/1/015013, Google ScholarCrossref
- 15. J. S. Park, J. K. Jeong, H. J. Chung, Y. G. Mo, and H. D. Kim, Appl. Phys. Lett. 92, 072104 (2008). https://doi.org/10.1063/1.2838380, Google ScholarScitation, ISI
- 16. J. K. Jeong, H. W. Yang, J. H. Jeong, Y. G. Mo, and H. D. Kim, Appl. Phys. Lett. 93, 123508 (2008). https://doi.org/10.1063/1.2990657, Google ScholarScitation, ISI
- 17. S. Chang, Y. W. Song, S. Lee, S. Y. Lee, and B. K. Ju, Appl. Phys. Lett. 92, 192104 (2008). https://doi.org/10.1063/1.2924769, Google ScholarScitation
- 18. P. Barquinha, L. Pereira, G. Goncalves, R. Martins, and E. Fortunato, Electrochem. Solid-State Lett. 11, H248 (2008). https://doi.org/10.1149/1.2945869, Google ScholarCrossref
- 19. S. C. Deane, R. B. Wehrspohn, and M. J. Powell, Phys. Rev. B 58, 12625 (1998). https://doi.org/10.1103/PhysRevB.58.12625, Google ScholarCrossref
- 20. K. Nomura, T. Kamiya, H. Ohta, M. Hirano, and H. Hosono, Appl. Phys. Lett. 93, 192107 (2008). https://doi.org/10.1063/1.3020714, Google ScholarScitation, ISI
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