ABSTRACT
Atomic H exposure of a GaAs surface at is a relatively simple method for removing the native oxides without altering the surface stoichiometry. In-situ reflection high energy electron diffraction and angle-resolved x-ray photoelectron spectroscopy have been used to show that this procedure applied to effectively removes the native oxides resulting in an atomically clean surface. However, the bulk InGaAs stoichiometry is not preserved from this treatment. The In:Ga ratio from the substrate is found to decrease by 33%. The implications for high-mobility channel applications are discussed as the carrier mobility increases nearly linearly with the In content.
This work was supported by the MARCO Focus Center on Materials, Structures, and Devices, the National Institute of Standards and Technology, Semiconductor Electronics Division, and the Science Foundation Ireland.
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